It is rumored that China’s domestic lithography machine factory is located in Xiong’an New District, Hebei province. Recently, a news has been widely circulated on major video platforms, statingBeijingThe EUV project of Tsinghua University has made ASML’s lithography machines huge and localized the lithography machines, and it is learned that this project has been implemented in Xiong’an New Area.
The hardest part of EUV is the light source. There are rumors in the Chinese industry that they intend to make a huge lithography machine, using a ring accelerator with a circumference of 100 to 150 meters as a “light source”, and then driving several or even dozens of lithography Machines. work, in other words, it is not a single lithography machine, it is a lithography machine factory,WaferThe concept of the processing line is that there are multiple EUV light source beam lines on it, and multiple lithography machines are started at the same time. All equipment in an entire lithography factory is designed around this light source.
Industry insiders pointed out that the lithography machines produced by ASML are mainly for sale in the world. When considering transportation of machines, miniaturization should be considered. The light source of lithography machines must also be miniaturized. If China builds its own ultra-large lithography machines, engraving machines, or even builds lithography machine factories that can complete different processes, the cost will not only not increase, but also decrease, because the cost from using larger May be less.
Coincidentally, state funds were used to build a huge light source research and development building on Yankee Lake in Huairou, Beijing. The shape of the giant ring-shaped building led Chinese netizens to suspect that it might be used as a photolithography machine factory, and it would be built in 2025. Enable.
The paper reported that China Electronics Engineering Design Institute Co., Ltd. (hereinafter referred to as China Electronics Institute) said on the 18th that the project was not the domestic lithography machine factory reported online, but the Beijing High-Energy Synchrotron Radiation Source Project Was. (HEPS).
The Beijing High-Energy Synchrotron Radiation Light Source Project is located on the shore of Yanqi Lake in Huairou, Beijing. It is a key scientific and technological infrastructure for the country’s “13th Five-Year Plan” (2016–2020). It is China’s first high-energy synchrotron radiation light source and the brightest in the world. One of four generations of synchrotron radiation light sources. Construction of the project began in early 2019 and will be put into use by the end of 2025.
What are HEPS used for? Its function is to accelerate the electron beam to 6GeV through an accelerator, then inject it into a storage ring with a circumference of 1,360 meters, and keep it running at a speed close to the speed of light. When the electron beam passes through the bending magnets or various inserts at different locations of the storage ring, it will release stable, high-energy and high-brightness light along the tangential direction of the deflection track, which is synchrotron radiation.
The China Electronics Institute reported that HEPS can be regarded as an ultra-precise, ultra-high-speed and powerfully penetrating giant X-ray machine. The tiny rays it produces can penetrate the material and perform three-dimensional scanning deep into the molecules. And nuclear. Observing the microscopic world on a large scale and in multiple dimensions, HEPS is a large scientific instrument for conducting scientific experiments, not an online photolithography machine factory.
The China Electronics Institute said the project was led by Lu Yu, national survey and design master and chief scientist of SDIC. Several technical research and design teams from China Electronics Institute collaborated to overcome many technical and technological problems ranging from project feasibility studies. project implementation. Difficulties in craftsmanship. At present, the high-energy synchrotron radiation light source supporting project has been completely completed.